Browsing by author "Hodeau, J-L."

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Microstructural characterization of side walls in SBT 3D capacitors

Menou, N.; Goux, Ludovic; Lisoni, Judit; Schwitters, M.; Turquat, Ch.; Madigou, V.; Hodeau, J-L.; Muller, Ch.; Wouters, Dirk (2004)
Side walls contribution in integrated 3D SBT-based capacitors: electrical and microstructural point of view

Menou, N.; Madigou, V.; Turquat, Ch.; Goguenheim, D.; Muller, Ch.; Goux, Ludovic; Lisoni, Judit; Schwitters, M.; Wouters, Dirk; Barret, R.; Hodeau, J-L. (2004)