Publication:

Microstructural characterization of side walls in SBT 3D capacitors

Date

2004
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Author(s)

Menou, N.
;
Goux, Ludovic  
;
Lisoni, Judit
;
Schwitters, M.
;
Turquat, Ch.
;
Madigou, V.
;
Hodeau, J-L.
;
Muller, Ch.
;
Wouters, Dirk

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1917 since deposited on 2021-10-15
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1917 since deposited on 2021-10-15
Acq. date: 2026-01-25

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