Publication:
Microstructural characterization of side walls in SBT 3D capacitors
Date
| dc.contributor.author | Menou, N. | |
| dc.contributor.author | Goux, Ludovic | |
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Schwitters, M. | |
| dc.contributor.author | Turquat, Ch. | |
| dc.contributor.author | Madigou, V. | |
| dc.contributor.author | Hodeau, J-L. | |
| dc.contributor.author | Muller, Ch. | |
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.imecauthor | Goux, Ludovic | |
| dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
| dc.date.accessioned | 2021-10-15T14:48:42Z | |
| dc.date.available | 2021-10-15T14:48:42Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9285 | |
| dc.source.conference | 16th International Symposium on Integrated Ferroelectrics | |
| dc.source.conferencedate | 5/04/2004 | |
| dc.source.conferencelocation | ||
| dc.title | Microstructural characterization of side walls in SBT 3D capacitors | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |