Browsing by author "Anberg, Doug"

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Intra-field stress impact on global wafer deformation

van Haren, Richard; Otten, Ronald; Singh, Subodh; Singh, Amandev; Van Dijk, Leon; Owen, David; Anberg, Doug; Mileham, Jeffrey; Gu, Yajun; Hermans, Jan (2019)
Wafer shape based in-plane distortion predictions using superfast 4G metrology

Van Dijk, Leon; Mileham, Jeffrey; Malakhovsky, Ilja; Laidler, David; Dekkers, Harold; Van Elshocht, Sven; Anberg, Doug; Owen, David M.; van Haren, Richard (2017)