Wafer shape based in-plane distortion predictions using superfast 4G metrology

Van Dijk, Leon; Mileham, Jeffrey; Malakhovsky, Ilja; Laidler, David; Dekkers, Harold; Van Elshocht, Sven; Anberg, Doug; Owen, David M.; van Haren, Richard

doi:10.1117/12.2257475

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Wafer shape based in-plane distortion predictions using superfast 4G metrology

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2017

Proceedings Paper

https://doi.org/10.1117/12.2257475

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Wafer shape based in-plane distortion predictions using superfast 4G metrology

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