Browsing by author "Phillips, Mark"
Now showing items 1-3 of 3
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Evaluation of a new advanced low-k material
Smirnov, Evgeny; Vanstreels, Kris; Verdonck, Patrick; Ciofi, Ivan; Shamiryan, Denis; Baklanov, Mikhaïl; Phillips, Mark (2011) -
First evaluation of new advanced SOG 2.0 low-k material
Smirnov, Evgeny; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; Baklanov, Mikhaïl; Phillips, Mark (2010) -
Impact of curing condition on chemical stability of ultralow-k PMO material
Krishtab, Mikhail; Zhang, Liping; Le, Quoc Toan; Vanstreels, Kris; Souriau, Laurent; Phillips, Mark; Baklanov, Mikhaïl (2012)