Evaluation of a new advanced low-k material

Thumbnail
View/open
Metadata
Show full item record
Authors
Smirnov, Evgeny; Vanstreels, Kris; Verdonck, Patrick; Ciofi, Ivan; Shamiryan, Denis; Baklanov, Mikhaïl; Phillips, Mark
ISSN
0021-4922
Journal
Japanese Journal of Applied Physics
Volume
50
Title
Evaluation of a new advanced low-k material
Publication type
Journal article
Embargo date
9999-12-31
Collections