First evaluation of new advanced SOG 2.0 low-k material

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Authors
Smirnov, Evgeny; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; Baklanov, Mikhaïl; Phillips, Mark
Conference
Advanced Metallization Conference; 20th Asian Session - ADMETA
Title
First evaluation of new advanced SOG 2.0 low-k material
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Meeting abstract
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