Publication:

First evaluation of new advanced SOG 2.0 low-k material

Date

2010

Meeting abstract

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Author(s)

Smirnov, Evgeny

;

Vanstreels, Kris

;

Verdonck, Patrick

;

Shamiryan, Denis

;

Baklanov, Mikhaïl

;

Metrics

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Acq. date: 2025-12-12