Publication:

First evaluation of new advanced SOG 2.0 low-k material

Date

2010
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorSmirnov, Evgeny
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorShamiryan, Denis
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorPhillips, Mark
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-18T21:42:35Z
dc.date.available2021-10-18T21:42:35Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18003
dc.source.conferenceAdvanced Metallization Conference; 20th Asian Session - ADMETA
dc.source.conferencedate19/10/2010
dc.source.conferencelocationTokyo Japan
dc.title

First evaluation of new advanced SOG 2.0 low-k material

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions