Browsing by author "Zimmerman, J."

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Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells

Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Baron, S.; Tsai, M.-C.; Ning, K.; Hsu, S.; Liu, H.Y.; Mulder, M.; Bouma, A.; van der Heijden, E.; Mouraille, O.; Schreel, K.; Finders, Jo; Dusa, Mircea; Zimmerman, J.; Graeupner, Paul; Neumann, J.T.; Hennerkes, C. (2010)
Impact of an etched EUV mask black border on imaging and overlay

Davydova, N.; de kruif, R.; Fukugami, N.; Kondo, S.; Philipsen, Vicky; Van Setten, E.; Connolly, B.; Lammers, A.; Vaenkatesan, V.; Zimmerman, J.; Harned, N. (2012)