Browsing by author "Zou, Yi"

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EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes

Gronheid, Roel; Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Karageorgos, Ioannis; Ryckaert, Julien; Chan, BT; Li, Chenxi; Zou, Yi (2016)
Feasibility study of grapho-epitaxy DSA for complementing EUV lithography beyond N10

Lin, Chenxi; Zou, Yi; Ambesi, Davide; Druzhinina, Tamara; Wuister, Sander; Karageorgos, Ioannis; Ryckaert, Julien; Raghavan, Praveen; Gronheid, Roel (2015)