Browsing by author "Belov, Igor"
Now showing items 1-1 of 1
-
Low temperature SiCN as dielectric for hybrid bonding
Channam, Venkat Sunil Kumar; Iacovo, Serena; Walsby, Edward; Belov, Igor; Jourdain, Anne; Sepulveda Marquez, Alfonso; Beyne, Eric (2023)