Browsing by author "Fisher, P."

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Controlling scratching in Cu Cchemical-mechanical planarization (CuCMP)

Eusner, Thor; Saka, N.; Chun, J-H; Armini, Silvia; Moinpour, M.; Fisher, P. (2008)
Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP

Sinapi, Fabrice; Heylen, Nancy; Travaly, Youssef; Vereecke, Guy; Baklanov, Mikhaïl; Kesters, Els; Van Hoeymissen, Jan; Hernandez, Jose Luis; Beyer, Gerald; Fisher, P. (2007)