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Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP
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1943 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-05
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Statistics
Views
1943 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-05
Citations