Authors

Sinapi, Fabrice; Heylen, Nancy; Travaly, Youssef; Vereecke, Guy; Baklanov, Mikhaïl; Kesters, Els; Van Hoeymissen, Jan; Hernandez, Jose Luis; Beyer, Gerald; Fisher, P.

Issue

11

Journal

Microelectronic Engineering

Volume

84

Title

Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP

Publication type

Journal article