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Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP
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1938 since deposited on 2021-10-16
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Acq. date: 2025-10-24
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Views
1938 since deposited on 2021-10-16
416item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations