Publication:
Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP
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1947 since deposited on 2021-10-16
3last month
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Acq. date: 2026-08-10
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Statistics
Views
1947 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-08-10
Citations