Browsing by author "Oyhama, Hidenori"

Now showing items 1-1 of 1

Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy

Oyhama, Hidenori; Naka, N.; Takakura, K.; Tsunoda, I.; Londos, C.A; Bargallo Gonzalez, Mireia; Simoen, Eddy; Claeys, Cor (2010)