Authors

Oyhama, Hidenori; Naka, N.; Takakura, K.; Tsunoda, I.; Londos, C.A; Bargallo Gonzalez, Mireia; Simoen, Eddy; Claeys, Cor

Conference

E-MRS Spring Meeting Symposium H: Post-Si CMOS Electronic Devices: The Role of Ge and III-V Materials

Title

Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy

Publication type

Meeting abstract