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Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
Publication:
Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
Date
2010
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Oyhama, Hidenori
;
Naka, N.
;
Takakura, K.
;
Tsunoda, I.
;
Londos, C.A
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Claeys, Cor
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1883
since deposited on 2021-10-18
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Metrics
Views
1883
since deposited on 2021-10-18
421
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations