Browsing by author "Snelgrove, Matthew"
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Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films
Zyulkov, Ivan; Madhivala, Viraj; Voronina, Ekaterina; Snelgrove, Matthew; Bogan, Justin; O'Connor, Rob; De Gendt, Stefan; Armini, Silvia (2020)