Browsing by author "Sato, M."
Now showing items 1-4 of 4
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Investigation of time-frequency features for GPR landmine discrimination
Savelyev, T.; Van Kempen, L.; Sahli, Hichem; Sachs, J.; Sato, M. (2007) -
Rapid recovery process of plasma damaged porous low-k dielectrics by wet surface modifying treatment
Iwasaki, A,; Higuchi, A.; Komori, K.; Sato, M.; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank (2016) -
Removal of small (<100-nm) particles and metal contamination in single-wafer cleaning tool
Eitoku, Atsuro; Snow, Jim; Vos, Rita; Sato, M.; Hirae, S.; Nakajima, K.; Nonomura, M.; Imai, M.; Mertens, Paul; Heyns, Marc (2003) -
Surface preparation and wet cleaning for germanium surface
Shirakawa, Hajime; Snow, j.; Otsuji, M.; Yoshida, Y.; Takahashi, H.; Sebaai, Farid; Holsteyns, Frank; Sato, M. (2017)