Browsing by author "van Setten, Eelco"
Now showing items 1-11 of 11
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22nm node imaging and beyond: a comparison of EUV and ArFi double patterning
van Setten, Eelco; Mouraille, O.; Wittebrood, F.; Dusa, Mircea; van Ingen-Schenau, Koen; Finders, Jo; Feenstra, Kees; Bekaert, Joost; Laenens, Bart; Philipsen, Vicky; Ercken, Monique; Hendrickx, Eric; Vandenberghe, Geert (2010) -
22nm node imaging and beyond: When will EUV take over?
van Setten, Eelco; Mouraille, Orion; Wittebrood, Friso; Dusa, Mircea; van Ingen-Schenau, Koen; Finders, Jo; Feenstra, Kees; Bekaert, Joost; Laenens, Bart; Philipsen, Vicky; Ercken, Monique; Hendrickx, Eric; Vandenberghe, Geert (2010) -
Edge placement error analysis for N7 logic patterning options
van Setten, Eelco; Psara, Eleni; Wittebrood, Friso; Oorschot, Dorothe; van Dijk, Joep; Schiffelers, Guido; Finders, Jo; Dusa, Mircea; Philipsen, Vicky; Hendrickx, Eric (2015) -
EUV resist contrast loss determination using interference lithography
Langner, Andreas; Solak, Harun H.; Auzelyte, Vaida; Ekinci, Yasin; David, Christian; Gobrecht, Jens; Gronheid, Roel; van Setten, Eelco; van Ingen Schenau, Koen; Feenstra, Kees (2009) -
Evaluation of resist performance for 22nm half-pitch and beyond using EUV interference lithography
Langner, Andreas; Ekinci, Yasin; Gronheid, Roel; Wang, Suping; van Setten, Eelco; van Ingen-Schenau, Koen; Feenstra, Kees; Mallmann, Joerg; Maas, Raymond (2010) -
Experimental verification of high-NA imaging simulations using SHARP
Davydova, Natalia; Liu, Fei; Benk, Markus; van Setten, Eelco; Bottiglieri, Gerardo; van Oosten, Anton; McNamara, John; Wiaux, Vincent; Franke, Joern-Holger; Goldberg, Kenneth; Nam, D. S.; Zekry, Joseph; Naulleau, Patrick; Fliervoet, Timon; Carpaij, Rene (2020) -
Measuring resist-induced contrast loss using EUV interference lithography
Langner, Andreas; Solak, Harun H.; Gronheid, Roel; van Setten, Eelco; Auzelyte, Vaida; Ekinci, Yasin; van Ingen Schenau, Koen; Feenstra, Kees (2010) -
NXE:3300 insertion for N7 : status and challenges
Philipsen, Vicky; Mochi, Iacopo; Van Look, Lieve; Lorusso, Gian; Luong, Vu; Hendrickx, Eric; Wittebrood, Friso; Schiffelers, Guido; van Setten, Eelco; Fliervoet, Timon; Dusa, Mircea (2015) -
Patterning options for N7 logic : Prospects and challenges for EUV
van Setten, Eelco; Wittebrood, Friso; Psara, Eleni; van Oorschot, Dorothe; Philipsen, Vicky (2015) -
Stitching for High NA: zooming in on CDU budget
Davydova, Natalia; van Look, Lieve; Weldeslassie, Ataklti; Wiaux, Vincent; Huddleston, Laura; Slachter, Bram; Pellens, Nick; Timmermans, Frank; Wittebrood, Friso; van Setten, Eelco; Wilson, Daniel (2023) -
Understanding of Out-of-Band DUV light in EUV lithography: controlling impact on imaging and mitigation strategies
Davydova, Natalia; Kottumakulal, Ram; Hageman, J.; McNamara, J.; Hoefnagels, Rik; Vaenkatesan, V.; van Dijk, Andre; Ricken, K.; de Winter, L.; De Kruif, Robert; Jonckheere, Rik; Hollink, T.; Schiffelers, Guido; van Setten, Eelco; Colsters, P.; Liebregts, W.; Pellens1, Rudy; van Dijk, Joep (2015)