Browsing by author "Witters, J."
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Fundamental study of atomic layer deposition in and on porous low-k films
Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Farrell, L; Baklanov, Mikhaïl; Tielens, Hilde; Van Besien, Els; Witters, J.; Nyns, Laura; Van Elshocht, Sven (2011)