Authors

Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Farrell, L; Baklanov, Mikhaïl; Tielens, Hilde; Van Besien, Els; Witters, J.; Nyns, Laura; Van Elshocht, Sven

Conference

IEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM

Title

Fundamental study of atomic layer deposition in and on porous low-k films

Publication type

Proceedings paper