Browsing by author "Kolbesen, B. O."
Now showing items 1-6 of 6
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Advanced single chemistry alkaline cleaning in a STEAG single tank tool
Onsia, Bart; Schellkes, E.; Vos, Rita; De Gendt, Stefan; Doll, O.; Fester, A.; Kolbesen, B. O.; Hoffman, M.; Hatcher, Z.; Wolke, K.; Mertens, Paul; Heyns, Marc (2001) -
Alkaline cleaning of silicon wafers: additives for the prevention of metal contamination
Martin Hoyas, Ana; Baeyens, Martien; Hub, W.; Mertens, Paul; Kolbesen, B. O. (1999) -
Effect of metal contamination and improved cleaning strategies
Mertens, Paul; Bearda, Twan; Loewenstein, Lee; Martin, A.R.; Hub, W.; Kolbesen, B. O.; Teerlinck, Ivo; Vos, Rita; Baeyens, Martien; De Gendt, Stefan; Kenis, Karine; Heyns, Marc (1999) -
Single chemistry cleaning solution for advanced wafer cleaning
Vos, Rita; Doll, O.; Fester, A.; Kolbesen, B. O.; Lux, Marcel; Kenis, Karine; Onsia, Bart; De Gendt, Stefan; Schellkes, E.; Hatcher, Z.; Mertens, Paul; Heyns, Marc (2001) -
Single step alkaline cleaning solution for advanced semiconductor cleaning
Baeyens, Martien; Hub, W.; Kolbesen, B. O.; Martin, A.R.; Mertens, Paul (1998) -
Single step alkaline cleaning solution for advanced semiconductor cleaning
Baeyens, Martien; Hub, W.; Kolbesen, B. O.; Martin, A.R.; Mertens, Paul (1999)