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Single chemistry cleaning solution for advanced wafer cleaning
Publication:
Single chemistry cleaning solution for advanced wafer cleaning
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Date
2001
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vos, Rita
;
Doll, O.
;
Fester, A.
;
Kolbesen, B. O.
;
Lux, Marcel
;
Kenis, Karine
;
Onsia, Bart
;
De Gendt, Stefan
;
Schellkes, E.
;
Hatcher, Z.
;
Mertens, Paul
;
Heyns, Marc
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1935
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1935
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations