Authors

Vos, Rita; Doll, O.; Fester, A.; Kolbesen, B. O.; Lux, Marcel; Kenis, Karine; Onsia, Bart; De Gendt, Stefan; Schellkes, E.; Hatcher, Z.; Mertens, Paul; Heyns, Marc

Conference

Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS

Title

Single chemistry cleaning solution for advanced wafer cleaning

Publication type

Proceedings paper

Embargo date

9999-12-31