Browsing by author "Yamazaki, Y."

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Massive metrology of 2D logic patterns on BEOL EUVL

Das, Sayantan; Kang, S.; Halder, Sandip; Maruyama, K.; Leray, Philippe; Yamazaki, Y. (2020)
Realizing more accurate OPC models by utilizing SEM contours

Wei, C.; Sejpal, R.; Deng, Y.; Kusnadi, I.; Fenger, G.; Oya, M.; Okamoto, Y.; Maruyama, K.; Yamazaki, Y.; Das, Sayantan; Halder, Sandip; Gillijns, Werner (2020)