Browsing by author "Berney, Jean"
Now showing items 1-4 of 4
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Advanced metrology for beyond silicon semiconductor device structures
Schulze, Andreas; Loo, Roger; Meersschaut, Johan; van Dorp, Dennis; Gachet, David; Berney, Jean; Vandervorst, Wilfried; Caymax, Matty (2015) -
Recent progress in advanced in-line metrology for high-mobility semiconductors
Schulze, Andreas; Loo, Roger; Meersschaut, Johan; van Dorp, Dennis; Gachet, David; Berney, Jean; Vandervorst, Wilfried; Caymax, Matty (2015) -
Seeing the invisible: metrology for extended crystalline defects in beyond silicon semiconductors
Schulze, Andreas; Prokhodtseva, Anna; Vystavel, Tomas; Gachet, David; Berney, Jean; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty (2016) -
Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structures
Schulze, Andreas; Prokhodtseva, Anna; Vystavel, Tomas; Gachet, David; Berney, Jean; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty (2017)