Recent progress in advanced in-line metrology for high-mobility semiconductors

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Authors
Schulze, Andreas; Loo, Roger; Meersschaut, Johan; van Dorp, Dennis; Gachet, David; Berney, Jean; Vandervorst, Wilfried; Caymax, Matty
Conference
Frontiers of Characterization and Metrology for Nanoelectronics - FCMN
Title
Recent progress in advanced in-line metrology for high-mobility semiconductors
Publication type
Proceedings paper
Embargo date
9999-12-31
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