Browsing by author "Bartlett, Gregory"
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Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs
Rosseel, Erik; dhayalan,; Hikavyy, Andriy; Loo, Roger; Profijt, Harald; Kohen, David; Kubicek, Stefan; Chiarella, Thomas; Yu, Hao; Horiguchi, Naoto; Mocuta, Dan; Barla, Kathy; Thean, Aaron; Bartlett, Gregory; Margetis, Joe; Bhargava, Nupur; Tolle, John (2016)