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Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs
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Authors
Rosseel, Erik
;
dhayalan,
;
Hikavyy, Andriy
;
Loo, Roger
;
Profijt, Harald
;
Kohen, David
;
Kubicek, Stefan
;
Chiarella, Thomas
;
Yu, Hao
;
Horiguchi, Naoto
;
Mocuta, Dan
;
Barla, Kathy
;
Thean, Aaron
;
Bartlett, Gregory
;
Margetis, Joe
;
Bhargava, Nupur
;
Tolle, John
Conference
PRiME 2016 - 230th ECS Meeting (Fall) - Electrochemical Society: SiGe, Ge & Related Compounds: Materials, Processing and Devices
Title
Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs
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