Browsing by author "Godet, L."

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    • Heated implantation with amorphous carbon CMOS mask for scaled FinFETs 

      Togo, Mitsuhiro; Sasaki, Yuichiro; Zschaetzsch, Gerd; Boccardi, Guillaume; Ritzenthaler, Romain; Lee, Jae Woo; Khaja, F.; Colombeau, B.; Godet, L.; Martin, P.; Brus, Stephan; Altamirano Sanchez, Efrain; Mannaert, Geert; Dekkers, Harold; Hellings, Geert; Horiguchi, Naoto; Vandervorst, Wilfried; Thean, Aaron (2013)