Publication:

Heated implantation with amorphous carbon CMOS mask for scaled FinFETs

Date

2013

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Togo, Mitsuhiro

;

Sasaki, Yuichiro

;

Zschaetzsch, Gerd

;

Boccardi, Guillaume

;

Ritzenthaler, Romain

;

;

;

;

;

;

;

Altamirano Sanchez, Efrain

;

Mannaert, Geert

;

Dekkers, Harold

;

Hellings, Geert

;

Horiguchi, Naoto

;

Vandervorst, Wilfried

;

Metrics

1968 since deposited on 2021-10-21

1last month

Acq. date: 2025-12-10