Publication:

Heated implantation with amorphous carbon CMOS mask for scaled FinFETs

Date

2013

Proceedings Paper

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Author(s)

Togo, Mitsuhiro

;

Sasaki, Yuichiro

;

Zschaetzsch, Gerd

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Boccardi, Guillaume

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Ritzenthaler, Romain

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;

;

;

;

;

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Altamirano Sanchez, Efrain

;

Mannaert, Geert

;

Dekkers, Harold

;

Hellings, Geert

;

Horiguchi, Naoto

;

Vandervorst, Wilfried

;

Statistics

1971 since deposited on 2021-10-21

Acq. date: 2026-09-11