Publication:
Heated implantation with amorphous carbon CMOS mask for scaled FinFETs
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1968 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-09
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Metrics
Views
1968 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-09
Citations