Heated implantation with amorphous carbon CMOS mask for scaled FinFETs

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Author(s)

Togo, Mitsuhiro

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Sasaki, Yuichiro

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Zschaetzsch, Gerd

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Boccardi, Guillaume

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Ritzenthaler, Romain

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Altamirano Sanchez, Efrain

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Mannaert, Geert

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Dekkers, Harold

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Hellings, Geert

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Horiguchi, Naoto

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Vandervorst, Wilfried

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Metrics

1966 since deposited on 2021-10-21

Acq. date: 2025-10-23