Browsing by author "Gorhad, Kujan"

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Co-optimizatin of RegC and TWINSCANTM corrections to improve the intra-field on-product overlay performance

Gorhad, Kujan; Sharon, Ofir; Dmitriev, Vladimir; Cohen, Avi; van Haren, Richard; Roelofs, Christian; Cekli, H.E.; Gallagher, Emily; Leray, Philippe; Beyer, Dirk; Trautsch, Thomas; Steinert, Steffen (2016)
Enhanced wafer overlay residuals control; deep sub-nanometer at sub-millimeter lateral resolution

Sufrin, Yael; Leray, Philippe; Canga, Eren; Cohen, Avi; Dmitriev, Vladimir; Gorhad, Kujan (2019)