Browsing by author "Roy, Syamashree"
Now showing items 1-2 of 2
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EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers
Roy, Syamashree; Caron, Elke; Santos, Andreia; Franke, Joern-Holger; Vandereyken, Jelle; Halder, Sandip (2023) -
Hotspot discovery and variability analysis for advanced EUV processes
Sah, Kaushik; Chen, Zhijin; Zhang, Yao; Zhang, Liming; Zhang, Cao; Higgins, Craig; Burov, Anatoly; Parsey, Guy; Vukkadala, Pradeep; Gronheid, Roel; Jain, Arpit; Ramini, Ramakanth; Agrawal, Ankur; Sharma, Garima; Cross, Andrew; Roy, Syamashree; Blanco, Victor (2024)