EISBN
978-1-5106-6749-5
ISBN
978-1-5106-6748-8
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
Proceedings of SPIE
Volume
12750
Title
EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers
Publication type
Proceedings paper