Browsing by author "Santos, Andreia"
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EUV lithographic process enablement with novel litho track hardware
Santos, Andreia; Kosma, Vasiliki; Vandereyken, Jelle; Marhfour, H.; Tanaka, Y.; Harumoto, M.; Asai, M.; Stokes, H.; Suh, Hyo Seon; Foubert, Philippe; De Simone, Danilo (2021) -
EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers
Roy, Syamashree; Caron, Elke; Santos, Andreia; Franke, Joern-Holger; Vandereyken, Jelle; Halder, Sandip (2023)