Authors
Santos, Andreia;
Kosma, Vasiliki;
Vandereyken, Jelle;
Marhfour, H.;
Tanaka, Y.;
Harumoto, M.;
Asai, M.;
Stokes, H.;
Suh, Hyo Seon;
Foubert, Philippe;
De Simone, Danilo
EISBN
978-1-5106-4058-0
ISBN
978-1-5106-4057-3
ISSN
0277-786X
Conference
Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference
Journal
Proceedings of SPIE
Volume
11612
Title
EUV lithographic process enablement with novel litho track hardware
Publication type
Proceedings paper