Browsing by author "Kosma, Vasiliki"

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EUV lithographic process enablement with novel litho track hardware

Santos, Andreia; Kosma, Vasiliki; Vandereyken, Jelle; Marhfour, H.; Tanaka, Y.; Harumoto, M.; Asai, M.; Stokes, H.; Suh, Hyo Seon; Foubert, Philippe; De Simone, Danilo (2021)
Metal based materials for EUV lithography

Kosma, Vasiliki; De Simone, Danilo; Vandenberghe, Geert (2019)