Metal based materials for EUV lithography

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Authors

Kosma, Vasiliki; De Simone, Danilo; Vandenberghe, Geert

DOI

10.3390/ma12132124

ISSN

0914-9244

Issue

1

Journal

Journal of Photopolymer Science and Technology

Volume

32

Title

Metal based materials for EUV lithography

Publication type

Journal article

Embargo date

9999-12-31

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