Publication:

Metal based materials for EUV lithography

Date

2019

Journal article

https://doi.org/10.3390/ma12132124

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Files

43195.pdf 1.53 MB

Author(s)

Kosma, Vasiliki

;

De Simone, Danilo

;

Vandenberghe, Geert

Journal

Journal of Photopolymer Science and Technology

Statistics

1833 since deposited on 2021-10-27

Acq. date: 2026-07-18