EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers

Publication:

2023

Proceedings Paper

Author(s)

;

Caron, Elke

;

Santos, Andreia

;

Franke, Joern-Holger

;

;

Proceedings of SPIE

925 since deposited on 2024-01-13

Acq. date: 2026-01-07