Publication:
EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers
| dc.contributor.author | Roy, Syamashree | |
| dc.contributor.author | Caron, Elke | |
| dc.contributor.author | Santos, Andreia | |
| dc.contributor.author | Franke, Joern-Holger | |
| dc.contributor.author | Vandereyken, Jelle | |
| dc.contributor.author | Halder, Sandip | |
| dc.contributor.imecauthor | Roy, Syamashree | |
| dc.contributor.imecauthor | Franke, Joern-Holger | |
| dc.contributor.imecauthor | Vandereyken, Jelle | |
| dc.contributor.imecauthor | Halder, Sandip | |
| dc.contributor.orcidimec | Roy, Syamashree::0009-0009-3247-3252 | |
| dc.contributor.orcidimec | Franke, Joern-Holger::0000-0002-3571-1633 | |
| dc.contributor.orcidimec | Vandereyken, Jelle::0009-0005-9495-4431 | |
| dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
| dc.date.accessioned | 2024-02-05T13:34:34Z | |
| dc.date.available | 2024-01-13T17:47:51Z | |
| dc.date.available | 2024-02-05T13:34:34Z | |
| dc.date.issued | 2023 | |
| dc.identifier.doi | 10.1117/12.2687558 | |
| dc.identifier.eisbn | 978-1-5106-6749-5 | |
| dc.identifier.isbn | 978-1-5106-6748-8 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43408 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | Art. 127500P | |
| dc.source.conference | International Conference on Extreme Ultraviolet Lithography | |
| dc.source.conferencedate | OCT 02-05, 2023 | |
| dc.source.conferencelocation | Monterey | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 8 | |
| dc.source.volume | 12750 | |
| dc.title | EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |