Browsing by author "Thomas, Shawn G."

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Strain enhanced NMOS using in situ doped embedded Si1-xCx S/D stressors with up to 1.5% substitutional carbon content grown using a novel deposition process

Verheyen, Peter; Machkaoutsan, Vladimir; Bauer, Matthias; Weeks, Doran; Kerner, Christoph; Bender, Hugo; Shamiryan, Denis; Loo, Roger; Hoffmann, Thomas; Absil, Philippe; Biesemans, Serge; Thomas, Shawn G. (2008-06)