Browsing by author "Stone, M."
Now showing items 1-2 of 2
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Development of a global planarization process without CMP
Forester, Lynn; Coenegrachts, Bart; Stone, M.; Meynen, Herman; Grillaert, Joost; Van den hove, Luc (1994) -
Dual silicide technology: WSix polycide gate and self-aligned CoSi2 source/drain
Franssila, Samuli; Palmans, Roger; Stone, M.; Maex, Karen (1994)