Development of a global planarization process without CMP

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Authors
Forester, Lynn; Coenegrachts, Bart; Stone, M.; Meynen, Herman; Grillaert, Joost; Van den hove, Luc
Conference
11th VLSI Multilevel Interconnect Conference - VMIC
Title
Development of a global planarization process without CMP
Publication type
Proceedings paper
Embargo date
9999-12-31
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