Browsing by author "von Ammon, W."
Now showing items 1-3 of 3
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Characterization of interstitial related defects in p-silicon substrates by homoepitaxial
Schmolke, R.; Angelberger, W.; von Ammon, W.; Bender, Hugo (2001) -
Defects in As-grown silicon and their evolution during heat treatments
Vanhellemont, Jan; Dornberger, E.; Esfandyari, J.; Kissinger, G.; Trauwaert, Marie-Astrid; Bender, Hugo; Gräf, D.; Lambert, U.; von Ammon, W. (1997) -
Impact of hydrogen on oxygen precipitation and gate oxide integrity after RTA processing
Möller, T.; Obermeier, G.; Bearda, Twan; Huber, A.; Schmolke, R.; von Ammon, W.; Lerch, W. (2001)