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Impact of hydrogen on oxygen precipitation and gate oxide integrity after RTA processing
Publication:
Impact of hydrogen on oxygen precipitation and gate oxide integrity after RTA processing
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Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Möller, T.
;
Obermeier, G.
;
Bearda, Twan
;
Huber, A.
;
Schmolke, R.
;
von Ammon, W.
;
Lerch, W.
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1989
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2026-01-11
Citations
Metrics
Views
1989
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2026-01-11
Citations