Authors

Möller, T.; Obermeier, G.; Bearda, Twan; Huber, A.; Schmolke, R.; von Ammon, W.; Lerch, W.

Conference

GADEST 2001 - Proceedings of the 9th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology;

Title

Impact of hydrogen on oxygen precipitation and gate oxide integrity after RTA processing

Publication type

Proceedings paper