Browsing by author "Devonport, Joshua"

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Determination of the model for the chemical structure of porous PECVD low-k films

Verdonck, Patrick; Le, Quoc Toan; Devonport, Joshua; Huanca, Danilo; Gomes dos Santos Filho, Sebastiao; Conard, Thierry; Meersschaut, Johan; Baklanov, Mikhaïl; Van Elshocht, Sven (2015)
Effect of downstream plasma treatment on dissolution of fluorocarbon polymer in organic solvents

Le, Quoc Toan; Kesters, Els; Devonport, Joshua; Holsteyns, Frank; De Gendt, Stefan (2014)