Determination of the model for the chemical structure of porous PECVD low-k films

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Authors

Verdonck, Patrick; Le, Quoc Toan; Devonport, Joshua; Huanca, Danilo; Gomes dos Santos Filho, Sebastiao; Conard, Thierry; Meersschaut, Johan; Baklanov, Mikhaïl; Van Elshocht, Sven

ISSN

2162-8769

Issue

1

Journal

ECS Journal of Solid State Science and Technology

Volume

4

Title

Determination of the model for the chemical structure of porous PECVD low-k films

Publication type

Journal article

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