Publication:

Determination of the model for the chemical structure of porous PECVD low-k films

Date

2015

Journal article

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Author(s)

Verdonck, Patrick

;

;

Devonport, Joshua

;

;

Gomes dos Santos Filho, Sebastiao

;

Conard, Thierry

;

Meersschaut, Johan

;

Baklanov, Mikhaïl

;

Van Elshocht, Sven

Journal

ECS Journal of Solid State Science and Technology

Metrics

1828 since deposited on 2021-10-23

Acq. date: 2025-12-12