Publication:

Determination of the model for the chemical structure of porous PECVD low-k films

Date

2015

Journal article

Simple item page Full metadata Statistics

Author(s)

Verdonck, Patrick

;

;

Devonport, Joshua

;

;

Gomes dos Santos Filho, Sebastiao

;

Conard, Thierry

;

Meersschaut, Johan

;

Baklanov, Mikhaïl

;

Van Elshocht, Sven

Journal

ECS Journal of Solid State Science and Technology

Statistics

1834 since deposited on 2021-10-23

2last month

Acq. date: 2026-08-10